Wide-field Broadband EUV Transmission Ptychography using a High Harmonic Source
نویسندگان
چکیده
High harmonic generation (HHG) provides a laboratory scale source of coherent radiation ideally suited to lensless coherent diffractive imaging (CDI) in the EUV and X-ray spectral region. Here we demonstrate transmission EUV ptychography, a scanning variant of CDI, using radiation at a wavelength around 29 nm from an HHG source. Image resolution is diffraction-limited at 54 nm, and fields of view up to ∼100 μm are demonstrated. These results demonstrate the potential for wide-field, high resolution laboratory scale EUV imaging using HHG-based sources with potential application in biological imaging or EUV lithography pellicle inspection.
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